Single wavelength interferometry is a useful tool in the area of optical profilometry given its high sensitivity and resolution. However, its major drawbacks include its inability to quantify surface discontinuities and deformations that are greater than half a wavelength unambiguously. Nevertheless, multiple wavelength and white light interferometric techniques, with colour CCD cameras, have proven to be powerful alternatives that not only overcome the drawbacks of single wavelength interferometry but are also more effective in terms of being able to acquire multiple interference patterns simultaneously and producing high quality images. As such this report reviews the various multiple wavelength and white light interferometric techniques ...
We describe an optical system for 3-D profilometry based on the white light interferometer. We detai...
AbstractTraditionally, monochromatic wavelength interferometry is applied to the measurement of smoo...
Interferometers are widely used in industry for surface profiling of microsystems. It can be used to...
Interferometry has been widely used for surface metrology because of their precision, reliability, a...
With the ever decreasing tolerances in modern manufacturing processes it has become more important t...
White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D ...
White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D ...
Phase shifting white light interferometry (PSWLI) has been widely used for optical metrology applica...
Phase shifting white light interferometry (PSWLI) has been widely used for optical metrology applica...
White light interferometry is a well-established optical tool for surface metrology of reflective sa...
White light interferometry is a well-established optical tool for surface metrology of reflective sa...
This research exposes the foundations of optical metrology which occupies one of the most important ...
White light interferometry is a well-developed and very old technique for optical measurements. The ...
A new optical interferometery technique is to measure surfaces at the micro and nano-scales based on...
White light interferometry is routinely used for the reconstruction of the micro geometry of mechani...
We describe an optical system for 3-D profilometry based on the white light interferometer. We detai...
AbstractTraditionally, monochromatic wavelength interferometry is applied to the measurement of smoo...
Interferometers are widely used in industry for surface profiling of microsystems. It can be used to...
Interferometry has been widely used for surface metrology because of their precision, reliability, a...
With the ever decreasing tolerances in modern manufacturing processes it has become more important t...
White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D ...
White light interferometry (WLI) is a state-of-the-art technique for high resolution full-filed 3-D ...
Phase shifting white light interferometry (PSWLI) has been widely used for optical metrology applica...
Phase shifting white light interferometry (PSWLI) has been widely used for optical metrology applica...
White light interferometry is a well-established optical tool for surface metrology of reflective sa...
White light interferometry is a well-established optical tool for surface metrology of reflective sa...
This research exposes the foundations of optical metrology which occupies one of the most important ...
White light interferometry is a well-developed and very old technique for optical measurements. The ...
A new optical interferometery technique is to measure surfaces at the micro and nano-scales based on...
White light interferometry is routinely used for the reconstruction of the micro geometry of mechani...
We describe an optical system for 3-D profilometry based on the white light interferometer. We detai...
AbstractTraditionally, monochromatic wavelength interferometry is applied to the measurement of smoo...
Interferometers are widely used in industry for surface profiling of microsystems. It can be used to...