Investigation of nano-porous silicon fabricated by electrochemical etching

72 p.Porous silicon is quickly becoming an increasingly important and versatile electronic material in today's fabrication technology. Nowadays, because of its high reactivity due to its large surface area of the pores, porous silicon has been demonstrated as a useful sacrificial layer in surface micro machining. It's unique morphology made it an attractive material for the fabrication of the chemical sensing microstructures. It is also being use as planar emitters for efficient emission of electrons. In addition, porous silicon serves as a good substrate material for both the carbon nanotube material for the enhancement of the field emission property.Master of Science (Microelectronics