Microstructures with very high aspect ratio (VHAR) have diverse applications because the increased surface area leads to increased volume handling and sensitivity desired for many MicroElectro Systems (MEMS).DOCTOR OF PHILOSOPHY (MAE
Biomimetic architectures composed of arrays of high-aspect-ratio (HAR) micro/nanostructures have eme...
This thesis deals with the development of microfabrication technologies based on photoplastic struct...
International audienceThis work deals with recent advances in the microfabrication process technolog...
Microstructures with very high aspect ratio (VHAR) have diverse applications because the increased s...
Abstract—We have fabricated very-high-aspect-ratio (VHAR) silicon and metal microstructures in compl...
We have fabricated very-high-aspect-ratio (VHAR) silicon and metal microstructures in complex geomet...
Another application that requires ultra-thick photoresist films is micromachining in MEMS. Extremely...
We report on recent advances in micro fabrication technology using micromolding and high aspect rati...
The microsystem processing of today is based on an assortment of diverse and contrasting fabrication...
Metallic micro devices have advantages over silicon-based microdevices when subjected to high stress...
This work reports on recent advances in microfabrication process technology for medium to high-aspec...
Deep arrayed micro-hole arrays find applications in air-bearings, inkjet nozzles, micro filters, and...
SU-8 has been widely used in a variety of applications for creating structures in micro-scale as wel...
Abstract—A high-yield fabrication process for dense arrays of very-high-aspect-ratio (VHAR) freestan...
This Ph.D. thesis introduces a technology framework to fabricate MEMS devices using SU-8 photoresist...
Biomimetic architectures composed of arrays of high-aspect-ratio (HAR) micro/nanostructures have eme...
This thesis deals with the development of microfabrication technologies based on photoplastic struct...
International audienceThis work deals with recent advances in the microfabrication process technolog...
Microstructures with very high aspect ratio (VHAR) have diverse applications because the increased s...
Abstract—We have fabricated very-high-aspect-ratio (VHAR) silicon and metal microstructures in compl...
We have fabricated very-high-aspect-ratio (VHAR) silicon and metal microstructures in complex geomet...
Another application that requires ultra-thick photoresist films is micromachining in MEMS. Extremely...
We report on recent advances in micro fabrication technology using micromolding and high aspect rati...
The microsystem processing of today is based on an assortment of diverse and contrasting fabrication...
Metallic micro devices have advantages over silicon-based microdevices when subjected to high stress...
This work reports on recent advances in microfabrication process technology for medium to high-aspec...
Deep arrayed micro-hole arrays find applications in air-bearings, inkjet nozzles, micro filters, and...
SU-8 has been widely used in a variety of applications for creating structures in micro-scale as wel...
Abstract—A high-yield fabrication process for dense arrays of very-high-aspect-ratio (VHAR) freestan...
This Ph.D. thesis introduces a technology framework to fabricate MEMS devices using SU-8 photoresist...
Biomimetic architectures composed of arrays of high-aspect-ratio (HAR) micro/nanostructures have eme...
This thesis deals with the development of microfabrication technologies based on photoplastic struct...
International audienceThis work deals with recent advances in the microfabrication process technolog...
DOI
Add to ORKG