Amorphouscarbon(aC) or most commonly known as diamond like carbon(DLC)is traditionally used as a protective or passivation coatings. The prospect of a C, specifically low stress or stress free film for use in microelectro mechanical systems(MEMS)has stirred up quite an interest in the scientific community. In the as deposited state, the material exhibits extremely high compressive stress. In order for the micro machined structures to work, the films must have very low stress and very low stress gradients. Preliminary studies have shown Si doping not only reduces the stress, it can improve the haemocompatibility of a Caswell. Therefore, Si doped a-C is suitable for MEMS devices in medical applications. Amorphous carbon containing Si (aC(Si))...
Non-hydrogenated diamond-like carbon (DLC) films (also referred as ta-C) have been extensively studi...
The present report deals with preparation, properties and typical applications of hydrogenated amorp...
for special applications in small and medium sized companies. Thin films of amorphous carbon modific...
Although silicon doping of amorphous carbon films can lower the intrinsic compressive stress, doping...
This work investigates Diamond-like Carbon thick and thin films for applications in Microelectromech...
Sputter-deposited amorphous diamond-like carbon (DLC, a-C) on silicon has been investigated with res...
The aim of this experimental work is to identify how the surfaces of materials that are most often u...
Hydrogenated amorphous carbon (a-C:H) films are a class of non-crystalline materials composed of hyd...
In this contribution amorphous carbon (a-C) films are integrated as strain gauges in micromachined s...
Hyper-thermal species have been used to produce carbon-based films with mechanical and tribological ...
Hyper-thermal species have been used to produce carbon-based films with mechanical and tribological...
Diamond-like carbon (DLC) films combine several excellent properties like high hardness, low frictio...
Amorphous silicon-carbon alloy (a-Sii-xCx) has attracted much attention not only due to the composit...
The residual stress and atomic bond structure of Si-incorporated diamond-like carbon films were inve...
In the present study production of the freestanding film structures of diamond like carbon (DLC) and...
Non-hydrogenated diamond-like carbon (DLC) films (also referred as ta-C) have been extensively studi...
The present report deals with preparation, properties and typical applications of hydrogenated amorp...
for special applications in small and medium sized companies. Thin films of amorphous carbon modific...
Although silicon doping of amorphous carbon films can lower the intrinsic compressive stress, doping...
This work investigates Diamond-like Carbon thick and thin films for applications in Microelectromech...
Sputter-deposited amorphous diamond-like carbon (DLC, a-C) on silicon has been investigated with res...
The aim of this experimental work is to identify how the surfaces of materials that are most often u...
Hydrogenated amorphous carbon (a-C:H) films are a class of non-crystalline materials composed of hyd...
In this contribution amorphous carbon (a-C) films are integrated as strain gauges in micromachined s...
Hyper-thermal species have been used to produce carbon-based films with mechanical and tribological ...
Hyper-thermal species have been used to produce carbon-based films with mechanical and tribological...
Diamond-like carbon (DLC) films combine several excellent properties like high hardness, low frictio...
Amorphous silicon-carbon alloy (a-Sii-xCx) has attracted much attention not only due to the composit...
The residual stress and atomic bond structure of Si-incorporated diamond-like carbon films were inve...
In the present study production of the freestanding film structures of diamond like carbon (DLC) and...
Non-hydrogenated diamond-like carbon (DLC) films (also referred as ta-C) have been extensively studi...
The present report deals with preparation, properties and typical applications of hydrogenated amorp...
for special applications in small and medium sized companies. Thin films of amorphous carbon modific...