Add to ORKGThis research project looked into the possibility of developing the real 3D cavities using focused ion beam (FIB) milling.Master of Engineering (MPE
Three types of focused ion beam machine: focused ion beam milling (FIB milling), focused ion beam li...
With the ever-decreasing size of manufactured objects, fabrication processes driven by charged parti...
We demonstrate the use of focused ion beam milling to machine optical structures directly into the c...
Process chains are regarded as viable manufacturing platforms for the production of Microand Nano Te...
This study proposes the 3D micro-fabrication method on single crystal silicon using a focused ion be...
The major interest in Focused Ion Beam (FIB) has been driven by the potential of the process to enab...
In this paper, the major factors which cause fabrication divergence in the focused ion beam (FIB) mi...
Dr. Christine Kranz, School of Chemistry and Biochemistry presented a lecture at the Nano@Tech Meeti...
This paper discussed focused ion beam micro nano machining to fabricate MEMS (microelectromechanica...
In order to rapidly prototype novel devices with nanoscale precision, new fabrication techniques whi...
A simple process to fabricate 3 D microstructures on single crystal silicon is presented in this stu...
Process chains are regarded as viable manufacturing platforms for the production of Microand Nano Te...
64 p.Over the years small structures, as microscale or even nanoscale. have gained great focus and p...
Focused Ion Beam (FIB) is one of the state of the art micro/nano fabrication tools. It adopts both b...
This bachelor´s thesis deals with the ion-beam milling. Focused ion beam instrument is presented, as...
Three types of focused ion beam machine: focused ion beam milling (FIB milling), focused ion beam li...
With the ever-decreasing size of manufactured objects, fabrication processes driven by charged parti...
We demonstrate the use of focused ion beam milling to machine optical structures directly into the c...
Process chains are regarded as viable manufacturing platforms for the production of Microand Nano Te...
This study proposes the 3D micro-fabrication method on single crystal silicon using a focused ion be...
The major interest in Focused Ion Beam (FIB) has been driven by the potential of the process to enab...
In this paper, the major factors which cause fabrication divergence in the focused ion beam (FIB) mi...
Dr. Christine Kranz, School of Chemistry and Biochemistry presented a lecture at the Nano@Tech Meeti...
This paper discussed focused ion beam micro nano machining to fabricate MEMS (microelectromechanica...
In order to rapidly prototype novel devices with nanoscale precision, new fabrication techniques whi...
A simple process to fabricate 3 D microstructures on single crystal silicon is presented in this stu...
Process chains are regarded as viable manufacturing platforms for the production of Microand Nano Te...
64 p.Over the years small structures, as microscale or even nanoscale. have gained great focus and p...
Focused Ion Beam (FIB) is one of the state of the art micro/nano fabrication tools. It adopts both b...
This bachelor´s thesis deals with the ion-beam milling. Focused ion beam instrument is presented, as...
Three types of focused ion beam machine: focused ion beam milling (FIB milling), focused ion beam li...
With the ever-decreasing size of manufactured objects, fabrication processes driven by charged parti...
We demonstrate the use of focused ion beam milling to machine optical structures directly into the c...