Plasma Ion Immersion Implantation is a rapidly developing modification technique used for doping the near-surface regions of materials by implanting energetic ions from plasma, which will surround the sample in the vacuum chamber. This technique is widely known for its accuracy for dopant concentration and junction depth at implanted regions, and its cost saving properties. For this project, the author places the focus on selective emitter photovoltaic cells that are produced by High Density-Plasma Ion Immersion Implantation technique. Experimental exercises are conducted mainly on Nitrogen and Phosphine gas, as the implantation agent. In this Final Year Project (FYP) report, the author details his personal experiences and achievement...
Cette thèse a pour but d'étudier le dopage par implantation ionique pour la réalisation des différen...
Electricity consumption is increased in last twenty years. It is crucial therefore to find alternati...
A potentially cost-effective ion implanter for solar cells has become commercially available very re...
Plasma Ion Immersion Implantation is a rapidly developing modification technique used for doping the...
Session 6: Process Integration and Low-cost ManufacturingInternational audienceA key step to achieve...
International audienceIon Beam Services (IBS) has developed processes dedicated to silicon-based sol...
16th International Conference on Ion Implantation Technology, Marseille, FRANCE, JUN 11-16, 2006Inte...
AbstractIBS and INES have recently demonstrated the strong relevance of the plasma-immersion ion imp...
AbstractIn the paper, plasma immersion ion implantation (PIII) has been put forward to texture and d...
A plasma immersion ion implantation (PIII) process has been developed for realizing shallow doping p...
This study aims at investigating the use of ion implantation doping for the realization of emitters ...
Le dopage du silicium par implantation ionique pour le photovoltaïque est une application relativeme...
AbstractIn this paper we present recent advances of the Varian patterned ion implantation selective ...
Cette thèse a pour but d'étudier le dopage par implantation ionique pour la réalisation des différen...
Electricity consumption is increased in last twenty years. It is crucial therefore to find alternati...
A potentially cost-effective ion implanter for solar cells has become commercially available very re...
Plasma Ion Immersion Implantation is a rapidly developing modification technique used for doping the...
Session 6: Process Integration and Low-cost ManufacturingInternational audienceA key step to achieve...
International audienceIon Beam Services (IBS) has developed processes dedicated to silicon-based sol...
16th International Conference on Ion Implantation Technology, Marseille, FRANCE, JUN 11-16, 2006Inte...
AbstractIBS and INES have recently demonstrated the strong relevance of the plasma-immersion ion imp...
AbstractIn the paper, plasma immersion ion implantation (PIII) has been put forward to texture and d...
A plasma immersion ion implantation (PIII) process has been developed for realizing shallow doping p...
This study aims at investigating the use of ion implantation doping for the realization of emitters ...
Le dopage du silicium par implantation ionique pour le photovoltaïque est une application relativeme...
AbstractIn this paper we present recent advances of the Varian patterned ion implantation selective ...
Cette thèse a pour but d'étudier le dopage par implantation ionique pour la réalisation des différen...
Electricity consumption is increased in last twenty years. It is crucial therefore to find alternati...
A potentially cost-effective ion implanter for solar cells has become commercially available very re...