Development of MEMS devices for vibration and acoustic sensing and actuation applications

This report presents the development of MEMS devices for vibration and acoustic sensing and actuation applications under project JT ARC 6/97. In this project, a total of 23 international journal papers and 14 conference papers have been produced. The project was actually kicked off early 1998. We have been working on MEMS devices such as capacitive comb-driven micro-gyroscope, capacitive microphone, floating-electrode-electret-microphone, MEMS GHz micro-switch, ultrasonic transducer, single-chip integrated fluid systems, optical cross-connect switch, and development of lower stress film and bimetallic films for actuation applications