Total reflection x-ray fluorescence analysis of light elements under various excitation conditions

Total reflction x-ray fluorescence (TXRF) analysis was tested for its suitability for the photon-induced energy dispersiver analysis of light elements such as B, C, N, O, F, Na and Mg using a special spectrometer meeting the requirements for the detection of low-energy fluorescence radiation. The influence of different spectral modification devices such as a high-energy cut-off reflector and a multilayer monochromator were compared using excitation by a Cr tube and also synchrotron radiation. The effects on intensity, background and detection lilmits are compared and discussed. A new method of monitoring the x-ray beam to adjust total reflection by a CCD camera is introduced. Considerations on the penetration depth and information depth of light elements are presented