Multipurpose ICTM thermopile-based MEMS sensors have been successfully demonstrated as gas flow sensor, vacuum sensor, thermal converter and gas type sensor. Apart from further improvement of the sensor's design and performances, one direction of research is working towards realization of portable thermal devices. The aim of this paper is to present preliminary considerations of electrical building blocks and compact housing neccessary to realize a portable thermal vacuum device
This thesis deals with the reduction of gas sensor power consumption. Systems named electronic noses...
Tactile sensing is required for assistant robots. A new stacked sensor head was proposed which detec...
Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necess...
Realization of intelligent thermal vacuum sensors based on multipurpose thermopile micro-electromech...
In this paper we propose a novel operating principle for thermal vacuum sensor. The sensor considere...
AbstractWe report here the development of a simple and low-cost intelligent vacuum sensor based on m...
A new structure thermal vacuum sensor with two pn junction diodes, Th-A and Th-B, as a high sensitiv...
This paper presents design, fabrication and experimental results of multipurpose thermopile based se...
We investigate the applicability of a MEMS stage in a vacuum environment. The stage is suspended by ...
This thesis is a part of the CLEMPS (Closed Loop Embedded MEMS-based Precision Stage) project. Withi...
The problem of constructing a thermal sensor based on the technology of microelectromechanical syste...
International audienceWe present an experimental characterization of a new vacuum gauge based on a K...
We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurp...
Micromachined hotplates, membranes, filaments, and cantilevers have all been used as platforms for t...
The concept of the micro-structured vacuum sensor presented in this article is the measurement of t...
This thesis deals with the reduction of gas sensor power consumption. Systems named electronic noses...
Tactile sensing is required for assistant robots. A new stacked sensor head was proposed which detec...
Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necess...
Realization of intelligent thermal vacuum sensors based on multipurpose thermopile micro-electromech...
In this paper we propose a novel operating principle for thermal vacuum sensor. The sensor considere...
AbstractWe report here the development of a simple and low-cost intelligent vacuum sensor based on m...
A new structure thermal vacuum sensor with two pn junction diodes, Th-A and Th-B, as a high sensitiv...
This paper presents design, fabrication and experimental results of multipurpose thermopile based se...
We investigate the applicability of a MEMS stage in a vacuum environment. The stage is suspended by ...
This thesis is a part of the CLEMPS (Closed Loop Embedded MEMS-based Precision Stage) project. Withi...
The problem of constructing a thermal sensor based on the technology of microelectromechanical syste...
International audienceWe present an experimental characterization of a new vacuum gauge based on a K...
We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurp...
Micromachined hotplates, membranes, filaments, and cantilevers have all been used as platforms for t...
The concept of the micro-structured vacuum sensor presented in this article is the measurement of t...
This thesis deals with the reduction of gas sensor power consumption. Systems named electronic noses...
Tactile sensing is required for assistant robots. A new stacked sensor head was proposed which detec...
Vacuum equipment has a wide range of applications, and vacuum monitoring in such equipment is necess...