Short-Open Calibration Technique for Accurate LE-FDTD Simulation of MEM Switches
- A. FANTAUZZI
- F. ALIMENTI
- P. MEZZANOTTE
- FARINA, Marco
- L. ROSELLI
Publication date
January 2002
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
This paper proposes an accurate analysis of Microelectromechnanical (MEM) switches using the Lumped Element-Finite Difference Time Domain (LE-FDTD) method enriched of the Short-Open Calibration (SOC) technique. The application of this method allows the electrical behavior of MEM switches to be accurately predicted while reducing the computational CPU time
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