DOIAbstract
FIM technique has been applied to investigation of structural state of an ordered alloy implanted by Ar+ and N+ ions. An ordering-disordering phase transition has been observed in the ordered solid solution Cu3Au after irradiation with ions' energies 15-20 keV and doses 1016-1018 cm-2. A near-surface region which has remained ordered was found to contain a lot of radiation defects such as dislocations and segregations of copper atoms. The size of the radiation-disordered region has been measured in the process of controlled removal of atomic layers from the surface of specimens irradiated in different crystallographic directions. The depth of the modified zone is shown to exceed 250 nm. The nature of the structural defects is discussed
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