Microstructure of BaTiO3 and SrTiO3 layers obtained by injection MOCVD

BaTiO3 (BTO) and SrTiO3 (STO) layers were deposited by injection MOCVD using both a mixed Ba2Ti2, precursor (dissolved in hexane) and a Sr(thd)2, Ba(thd)2 and Ti(OPr)2(thd)2 precursor system (dissolved in monoglyme). Films have been deposited at different temperatures between 600°C and 850°C. The microstructural properties of the films obtained on different kinds of substrates MgO (100), LaAlO3 (012), sapphire (1-102). Si (100), Pt on Si and YBa2Cu3O7(YBCO) on LaAlO3, are compared