Corrosion behaviors of Mo coating on stainless steel 316 substrates implanted by different nitrogen ion fluences

The molybdenum nitride coating was produced by nitrogen ion implantation of the molybdenum layer deposited on the stainless steel 316 (SS) substrates. At first, molybdenum layers were deposited on the substrates by ion beam sputtering method, then nitrogen ions with an energy of 30 keV and a fluence between 1×1017 and 12×1017 N+ cm−2 were implanted in Mo/SS system. Crystal structure and topography of the surface are investigated by grazing incidence X-ray diffraction (GIXRD) and atomic force microscopy (AFM) image respectively. XRD patterns showed the formation of molybdenum nitride phases in all implanted samples. Corrosion tests showed that the corrosion resistance of the samples strongly depends on the nitrogen applied fluences. A considerable improvement of corrosion performance by increasing ions fluences was observed. The lowest corrosion current density with amount of 0.1 μA/cm2 was obtained at 12×1017 ions/cm2 fluence in our case