The application of glancing incidence X-ray reflectivity measurements for the investigation of submicrometer thick layers and multilayer stacks which are produced in modern technology processes is discussed. We describe different setups for X-ray reflectivity measurements and computer methods which allow the extraction of various layer parameters from the experimental data
We discuss a new method to characterize multilayer structures with grazing-incidence reflectivity me...
Periodic multilayers are increasingly used as reflecting and beam forming elements in the x-ray rang...
The present paper reviews recent extensions of the X-ray reflectivity technique, which is a powerful...
X-ray reflectometry and diffractometry are widely used non-destructive methods to characterize thin ...
International audienceWe present a method to characterize subnanometric layers based on grazing inci...
International audienceWe present a method to characterize subnanometric layers based on grazing inci...
International audienceWe present a method to characterize subnanometric layers based on grazing inci...
We have presented new schemes to analyse grazing incidence specular X-ray reflectivity data to obtai...
We have presented new schemes to analyse grazing incidence specular X-ray reflectivity data to obtai...
Specular and non-specular X-ray reflectivity measurements can be exploited to obtain interesting pro...
Specular and non-specular X-ray reflectivity measurements can be exploited to obtain interesting pro...
Current technology has made possible the fabrication of multilayered optical elements for soft x-ray...
Methods to deduce the parameters of a multilayer X-ray mirror from its reflectivity curve are review...
Methods to deduce the parameters of a multilayer X-ray mirror from its reflectivity curve are review...
We discuss a new method to characterize multilayer structures with grazing-incidence reflectivity me...
We discuss a new method to characterize multilayer structures with grazing-incidence reflectivity me...
Periodic multilayers are increasingly used as reflecting and beam forming elements in the x-ray rang...
The present paper reviews recent extensions of the X-ray reflectivity technique, which is a powerful...
X-ray reflectometry and diffractometry are widely used non-destructive methods to characterize thin ...
International audienceWe present a method to characterize subnanometric layers based on grazing inci...
International audienceWe present a method to characterize subnanometric layers based on grazing inci...
International audienceWe present a method to characterize subnanometric layers based on grazing inci...
We have presented new schemes to analyse grazing incidence specular X-ray reflectivity data to obtai...
We have presented new schemes to analyse grazing incidence specular X-ray reflectivity data to obtai...
Specular and non-specular X-ray reflectivity measurements can be exploited to obtain interesting pro...
Specular and non-specular X-ray reflectivity measurements can be exploited to obtain interesting pro...
Current technology has made possible the fabrication of multilayered optical elements for soft x-ray...
Methods to deduce the parameters of a multilayer X-ray mirror from its reflectivity curve are review...
Methods to deduce the parameters of a multilayer X-ray mirror from its reflectivity curve are review...
We discuss a new method to characterize multilayer structures with grazing-incidence reflectivity me...
We discuss a new method to characterize multilayer structures with grazing-incidence reflectivity me...
Periodic multilayers are increasingly used as reflecting and beam forming elements in the x-ray rang...
The present paper reviews recent extensions of the X-ray reflectivity technique, which is a powerful...
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