A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation

This paper presents the design, analysis, and testing of a single-axis compliant nanopositioning stage with large stroke driven by piezoelectric actuator for micro/nano manipulation. In the developed stage, a hybrid displacement amplifier integrating two kinds of flexure-based input/output decoupling modules have been developed to achieve a large stroke and precise positioning. The analytical modelling and finite element analysis are given to validate the mechanical performance and a prototype of the proposed stage is fabricated for performance tests. The experimental results show that the developed stage has the travel stroke of 214 μm with a resolution of 8 nm. It is demonstrated that the stage can be adequate for micro/nano manipulation