Electromagnetic field distributions in waveguide-based axial-type microwave plasma source

We present results from simulations of 2D distributions of the electromagnetic field inside a waveguide-based axial-type microwave plasma source (MPS) used for hydrogen production via methane reforming. The studies are aimed at optimization of discharge processes and hydrogen production. We derive equations for determining electromagnetic field distributions and next determine the electromagnetic field distributions for two cases – without and with plasma inside the MPS. For the first case, we examine the influence of the length of the inner conductor of the coaxial line on electromagnetic field distributions. We have obtained standing wave patterns along the coaxial line and found resonances for certain positions of the coaxial line inner conductor. For the case with plasma inside the MPS, we perform calculations assuming that distributions of plasma parameters are known. Simulations are done for several values of maximum electron density. We have found that for values of electron density greater than $3\times 10^{18}~{\rm m}^{-3}$ strong skin effect in the plasma is observed. Consequently, plasma may be treated as an extension of the inner conductor of the coaxial line. We have used FlexPDE software for the calculations