Some optical properties of amorphous hydrogenated carbon thin films prepared by rf plasma deposition using methane

Amorphous hydrogenated carbon (a-C:H) films were prepared by plasma enhanced chemical vapor deposition (PECVD) using methane. The optical properties of a-C:H films were investigated by reflectance and transmittance spectrometry in the visible and near-infrared regions. The dependence of refractive index, optical gap, and absorption coefficient are examined as a function of plasma power. (C) 2001 Elsevier Science Ltd. All rights reserved.32978378