Gas Phase Fabrication of Pd-Ni Nanoparticle Arrays for Hydrogen Sensor Applications

Pd-Ni nanoparticles have been fabricated by gas aggregation process. The formation of Pd-Ni nano-alloys was confirmed by X-ray photoelectron spectroscopy measurements. By depositing Pd-Ni nanoparticles on the interdigital electrodes, quantum conductance-based hydrogen sensors were fabricated. The Ni content in the nanoparticle showed an obvious effect on the hydrogen response behavior corresponding to the conductance change of the nanoparticle film. Three typical response regions with different conductance-hydrogen pressure correlations were observed. It was found that the α-β phase transition region of palladium hydride moves to significant higher hydrogen pressure with the addition of nickel element, which greatly enhance the hydrogen sensing performance of the nanoparticle film