PECVD of amorphous hydrogenated oxygenated nitrogenated carbon films

An actinometric optical emission spectroscopy (AOES) study of the trends in the concentrations of the plasma species H, CH, CO, OH, and CN in film-producing glow discharges of mixtures of isopropanol and nitrogen was undertaken. Conventional AOES was used to obtain the trends in the plasma concentrations of these species as a function of the proportion of nitrogen in the feed, R-n. A dynamic variant of actinometry in which trends in the concentrations of plasma species are measured as a function of time following the cutting of one of the principal gas flows was also employed to investigate the relative importance of gas phase and plasma/polymer-surface interactions in the production of the species of interest. Each of the above-mentioned species is produced, to some degree, by plasma/polymer-surface reactions. As revealed by transmission infrared spectroscopy, the films deposited contain C-H, C=O, and O-H groups. For R-n > 0, the films become nitrogenated, with both N-H and C=N groups being present. As revealed by transmission ultraviolet-visible spectroscopy, both the optical gap and the refractive index of the deposited films decrease as R-n is increased. (C) 1998 John Wiley & Sons, Inc.36111881188