The method of the analysis of thermal properties of layered structure with use of photoacoustic technique in pulse modulation mode

This paper exhibits the possibility of simultaneous detection of thermal non-uniformity in muliti-layer semiconductor structure and the analysis of the thermal properties of non-uniformities using photo-acoustic method in pulse excitations mode. The photo-acoustic method, besides many advantages, is characterized by high linear distortions of the measured signal. The linear distortions are introduced by each element of the measurement set-up. Classical methods of linear distortions elimination for example an inverse filtration in time domain need the transmittance of the measurement set-up to be well known. In the case of photo-acoustic measurement this condition can not be fulfill due to unknown transmittance of photo-acoustic phenomenon