Er, Yb, and Er, Yb (CO-)doped yttria thin films, deposited by an aerosol assisted MO-CVD process

Er, Yb and Er,Yb : Y2O3 thin films were deposited by an aerosol assisted MO-CVD atmospheric process. The source solution (rare earth 2,4-pentanedionates dissolved in butanol) is sprayed using an ultrasonic system. The films were obtained for deposition temperatures between 280°C and 540°C. At high temperature, the films are transparent, polycrystalline and smooth. We have used SEM, X-ray diffraction, EPMA, ellipsometry, and IR spectroscopy, for film characterisation. The Er3+ Luminescence was studied in IR and visible, where the classical green transitions have been observed. More, there are numerous evidence of the existence of up-conversion phenornena. A4l13/2 lifetime of 2.2 ms was found for a sample containing 0.6 at. % of Er