Fabrication And Characterization Of Active Pixel Sensors (aps) Using Simple Metal Gate Nmos Technology

Active pixel sensors (APS) based on simple nMOS technology with large feature size can offer good sensitivity for photodetection and be a low cost choice for imaging circuits. In this work, we present the design, fabrication and characterization of APSs with 200×200um photodiodes, which presented an ideality factor of 1.05 and a dark current of -150pA at -VDD (-5V). The APS has worked similarly as the SPICE simulations (error below 7%), presenting a 2.3V output voltage range and total discharge time of 48s when in complete darkness. These results indicate that these sensors can have a good performance in application specific circuits, such as position sensitive detectors and wavefront sensors. © The Electrochemical Society.231461467Fossum, E.R., Active Pixel Sensors - Are CCDs Dinosaurs? p. 2-14 (1993) Proc. SPIE, 1900Litwiller, D., CCD vs. CMOS: Facts and Fiction (2001) Photonics Spectra, pp. 151-154. , JanuaryFossum, E.R., (1997) IEEE Trans. Electron Devices, 44, p. 10Makynen, A., Ruotsalainen, T., Kostamovaara, J., (1997) Electronic letters, 33, p. 2de Lima Monteiro, D.W., (2002) CMOS-based Integrated Wavefront Sensor, , DUP ScienceMinas, G., Wolffenbuttel, R.F., Correia, J.H., (2005) Lab Chip, 5, p. 1303Manera, L.T., (2002) Determinação de Regras de Projeto e de Parâmetros de Simulação de urn processo nMOS para Fabricação de Circuitos Integrados, , M.S. thesis, UNICAMP, Campinas, BrasilD. S. de Lara, L. O. S. Ferreira, J. W. Swart, Advances in the Process and in the Methology od Emulsion Optical Masks Construction, p. 371-379, Proc. SBMICRO (2003)S. N. M. Mestanza, E. Rodriguez, H. G. Jimenez, J. A. Diniz, I. Doi, J. W. Swart, Characterization and Performance Evaluation of a APS Pixel in a Standard 2μm CMOS Technology, p. 32-38, Proc. SBMICRO (2005)Rezende, S.M., (2004) Materials e Dispositivos Eletrônicos, pp. 330-338. , Editora Livraria da Física, São PauloSun, S.C., Plummer, J.D., (1980) IEEE Trans. Electron Devices, 27, p. 8A. S. O. Furtado and D. W. L. Monteiro, CMOS Active-Pixel Structure for eye-aberration detection, p. 43-49, Proc. SBMICRO (2006