Atmospheric pressure chemical vapour deposition of chromium oxide films

Cr2O3 films have been deposited on glass substrates by atmospheric pressure chemical vapour deposition reaction of chromyl chloride with either water, ethyl acetate, methanol or ethanol. Films were deposited in the temperature range 450 °C - 600 °C. The Cr2O3 films were characterised by glancing angle XRD, SEM and X-ray photoelectron spectroscopy. These analyses showed that singlephase Cr2O3 was obtained at all deposition temperatures