Cryogenic detector systems for materials analysis
- J. Höhne
- M. Bühler
- F.V. Feilitzsch
- J. Jochum
- T. Hertrich
- C. Hollerith
- M. Huber
- J. Nicolosi
- K. Phelan
- D. Redfern
- B. Simmnacher
- R. Weiland
- D. Wernicke
DOIAbstract
The need to analyze small amounts of materials on surfaces e.g. in semiconductor industry drives the development of high resolution X-ray spectrometers based on superconducting detector technology. Since low excitation energies needed for high spatial resolution in Field Emission Scanning Electron Microscopes (FESEM) yield only X-ray lines in the lower part of the X-ray spectrum (<5keV), line overlaps become a serious issue in the spectral analysis. This problem can be overcome with superconducting detector technology having better energy resolution and thus the ability to separate X-ray lines of important material combinations. For industrial applications the cooling system for the superconducting sensor plays an important role, since liqu...
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