Production of Large Diameter ECR Plasma

The production of a large diameter ECR plasma with microwaves of frequency 2.45 GHz is reviewed, including our experimental results with a multi-slot antenna and a TE01 mode microwave converter. It is pointed out that the electromagnetic waves play an important role in plasma uniformity as well as plasma production. Furthermore, it is found that the X wave contributes to plasma uniformity for electron density of (1-2)x1017m-3 which almost corresponds to the L cutoff