Polymerie Optical Waveguides Fabricated By Plasma Fluorination Process

The fabrication and characterization of planar polymeric waveguides produced on silicon substrate for optical devices is reported. The cladding was made of a fluorinated polymer by CHF3 plasma polymerization and the core was a PMMA film prepared by spin coating. The polymeric waveguides with different widths (from 10 to 100 μm) were patterned by UV photolithography. The plasma fluorinated optical films were characterized by ellipsometry, metricon prism coupler, interferometer and FTIR-ATR. The waveguide optical characterization was done by coupling a laser beam, fibre-to-fibre coupling method, using a multimode optical fibre. © 2008 American Institute of Physics.992786790M. Large, M. A. van Eljkelenborg, R Lwin, G. Barton, L. Poladian, R. Tanner, S. Xue. An Overview of mPOF Fabrication in:WORKPOF, Rio de Janeiro and Campinas, 2006Harsányi, G., (1995) Polymer films in sensor applications-technology, materials, devices and their characteristics, , Pennsylvania: Technomic Publishing Company, Incd'Agostino, R., (1990) Plasma Deposition, Treatment & Etching of Polymers, pp. 96-161. , edited by Acad. PressBartoli, J.R., Costa, R., Verdonck, P., Mansano, R., Carreno, M., (1999) Polímeros- Ciência Tecnologia, 148Coburn, J., Ewinters, H., Vac, J., (1979) Sci, Technol,J,W, Sons, 16 (2), pp. 391-403Padilha, G.S., (2006) Estudo das variáveis de fluoração via plasma na deposição e crescimento de polímero parcialmente fluorado sobre filmes de PMMA, , M.Sc. Thesis, FEQ/Unicamp,Campinas, FebruaryC. L. Chen, F. Jen, F. Tamkang Journal of Science and Engineering, 7, 5-9 (2004)Sugihara, O., Mizuno, H., Jordan, S., Kaino, T., Okamoto, N., Oohama, M., Passive Alignment Structure: Simple Fabrication of Polymerie Optical Waveguide with POF Guides in 13th International Plastic Optical Fibres Conference-2004, Nurnberg (2004) Proceedings, pp. 496-499Koo, J.S., William, R.B., Grawith, C.B., Watts, S.P., Emmerson, G.D., Albanis, V., Smith, P.G.R., Grosse, M.C., (2003) Electronics Letters, 39, pp. 394-395Wochnowski, C., Meteva, K., Metev, S., Vollertsen, F., (2007) Materials Letters, 61, pp. 1046-104