Contact Improvement For Carbon Nanotubes Deposited By Dielectrophoresis

A method of dielectrophoresis was applied to align and deposit multi-wall carbon nanotubes between pre-fabricated metal (Au, Pd) electrodes with a micron scale separation. For improvement of nanotube contacts with electrodes, metal electroless process was used. Significant improvement of 2 terminals resistances was demonstrated. Further, using electron and ion beam deposited Pt contacts in two different configurations, 4 terminals measurements have been performed to evaluate intrinsic nanotube resistances. The values between 30 and 130 kΩ/μm were obtained for nanotubes with diameters in the range from 15 to 40 nm. © The Electrochemical Society.91213218Krupke, I.R., Hennrich, F., Weber, H.B., Beckmann, D., Hampe, O., Malik, S., Kappes, M.M., Lohneysen, H.V., (2003) Appl. Phys. A, 76, p. 397Hennrich, F., Krupke, R., Kappes, M.M., Lohneysen, H.V., (2005) J. Nanosci. Nanotechnol, 5, p. 1166Zhang, Z.-B., Zhang, S.-L., Campbell, E.E.B., (2006) J. Vac. Sci. Technol. B, 24, p. 131Banerjee, S., White, B.E., Huang, L., Rego, B.J., O'Brien, S., Herman, I.P., (2006) J. Vac. Sci. Technol. B, 24, p. 3173Hilding, J.M., Hong, M.P.L., Grulke, E.A., (2005) J. Nanosci. Nanotechnol, 5, p. 742Lee, D.S., Svensson, J., Lee, S.W., Park, Y.W., Campbell, E.E.B., (2006) J. Nanosci. Nanotechnol, 6, p. 1325Kim, K.S., Lee, I.B., Lim, S.C., Cho, S., Han, J.H., Lee, Y.H., (2005) J. Nanosci. Nanotechnol, 5, p. 895Nakabayashi, D., Silva, P.C., González, J.C., Rodrigues, V., Ugarte, D., (2006) Microscopy Microanal, 12, p. 311Maiti, A., Ricca, A., (2004) Chem. Phys. Lett, 395, p. 7Liebau, M., Unger, E., Duesberg, G.S., Graham, A.P., Seidel, R., Kreupl, F., Hoenlein, W., (2003) Appl. Phys. A, 77, p. 731Zirofif, J., Agnello, G., Rullan, J., Dovidenko, K., (2003) Nanotube-Based Devices, Material Research Society, P Bernier, 772, p. 159. , D. Carroll, G.-T. Kim, S. Roth, Eds, San Francisco, C