Plasma Parameters Obtained With Planar Probe And Optical Emission Spectroscopy

A planar probe and optical emission spectroscopy were employed to analyze parameters in an inductively coupled plasma (ICP).The analyses were performed in Ar, Ar+SF6 and O2 plasmas at 40 mTorr. Typical probe results indicate an ion current of 10-3 A/cm2 and an electron temperature (high energy tail) between 1-2 eV in measurements at high powers. At low powers a distinct discharge regime is observed, typically with low density (low ion current) and high electron temperature. The optical emission studies also showed the presence of these two regimes. Moreover, The electron temperature determination using this diagnostic is also in good agreement with planar probe results.226773Huddlestone, R.H., Leonard, S.L., (1965) Plasma Diagnostic Techniques, pp. 113-200. , Academic Press, New YorkSudit, I.D., Chen, F.F., RF compensated probes for high-density discharges (1994) Plasma Sources Sci. Technol, 3 (2), pp. 162-168. , MayLaframboise, J.G., Theory of spherical and cylindrical Langmuir probes in a collisionless plasma at rest (1966) Univ. Toronto Inst. Aerospace Studies Rept, 100. , JuneBraithwaite, N.S.J., Booth, J.P., Cunge, G., A novel electrostatic probe method for ion flux measurements (1996) Plasma Sources Sci. Technol, 5 (4), pp. 677-684. , NovemberCzerwiec, T., Graves, D.B., Mode transitions in low pressure, rare gas cylindrical ICP discharge studied by optical emission spectroscopy (2004) J. Phys. D: Appl. Phys, 37 (20), pp. 2827-2840. , OctoberLieberman, M.A., Lichtenberg, A.J., (1994) Principles of Plasma Discharges and Materials Processing, pp. 81-308. , John Wiley and Sons, New YorkChapman, B., (1980) Glow Discharge Processes, pp. 49-76. , John Wiley and Sons, New YorkSwart, L., Verdonck, P., Determination of the ion density and electron temperature using a planar electrostatic probe (2005) The Electrochemical Society Proceedings Series - PV, 2005 -08, pp. 254-262. , Microelectronics Technology and Devices, SBMicro2005Boffard, J.B., Lin, C.C., DeJoseph Jr, C.A., Application of excitation cross sections to optical plasma diagnostics (2004) J. Phys. D: Appl. Phys, 37 (12), pp. R143-R161. , JuneFrancis, A., Czarnetzki, U., Döbele, H.F., Sadeghi, N., Quenching of the 750.4 nm argon actinometry line by H2 and several hydrocarbon molecules (1997) Appl. Phys. Lett, 71 (26), pp. 3796-3798. , DecemberDaltrini, A.M., Moshkalev, S.A., Monteiro, M.J.R., Besseler, E., Kostryukov, A., Machida, M., Made transitions and hysteresis in inductively coupled plasmas (2007) J. Appl. Phys, 101 (7), p. 073309. , Apri