Controlled Deposition Of Carbon Nanotubes By Dielectrophoresis For Micro And Nanodevices

We present results of the study of the aligned carbon nanotubes deposition using a process of dielectrophoresis with AC eletric fields. Multi-walled nanotubes were deposited from aqueous suspensions over the systems of electrodes with separation of a few microns using frequencies in the range 10 Hz - 10 MHz and peak-to-peak voltages between 2 and 10 V. Better orientation of the nanotubes with reduced content of impurities deposition is achieved for frequencies higher than 1MHz. Electrical measurements confirmed that low resistivities between the electrodes (i.e., better quality of the nanotube deposition) were obtained for higher frequencies. The method can be used for fabrication of nanotube based micro and nanodevices. © 2006 The Electrochemical Society.41371376Ijima, S., (1991) Nature, 354, p. 56Saito, R., Dresselhaus, G., Dresselhaus, M.S., (1998) Physical Properties of Carbon Nanotubes, , Imperial College Press, LondonWang, Q.H., Yan, M., Chang, R.P.H., (2001) Appl. Phys. Lett, 78, p. 1294Tans, S.J., Verschueren, A.R.M., Dekker, C., (1998) Nature, 393, p. 49Wong, S.S., Joselevich, E., Woolley, A.T., Cheung, C.L., Lieber, C.M., (1998) Nature, 394, p. 52Cui, J.B., Sordan, R., Burghard, M.B., Kern, K., (2002) Appl. Phys. Lett, 81, p. 3260Zhang, Y., Ijima, S., (1999) Phys. Rev. Lett, 82, p. 3472Chen, X.Q., Saito, T., Yamada, H., Matsushige, K., (2001) Appl. Phys. Lett, 78, p. 3714Smith, B.W., Benes, Z., Luzzi, D.E., Fisher, I.E., Walters, D.A., Casavant, M.J., Schmidt, J., Smalley, R.M., (2000) Appl. Phys. Lett, 77, p. 663Liu, J., Casavant, M.J., Cox, M., Walters, D.A., Boul, P., Lu, W., Rimberg, A.J., Smalley, R.E., (1999) Chem..Phys. Lett, 303, p. 125Helbert, T., Martel, R., Avouris, P., (1998) J. Phys. Chem. B, 102, p. 910Yamamoto, K., Akita, S., Nakayama, Y., (1998) J. Phys. D: Appl. Phys, 31, pp. L34Krupke, R., Hennrich, F., Weber, H.B., Beckmann, D., Hampe, O., Malik, S., Kappes, M.M., Löhneysen, H.V., (2003) Appl. Phys. A, 76, p. 397Dimaki, M., Boggild, P., (2005) Nanotechnology, 16, p. 759Chan, R.H.M., Fung, C.K.M., Li, W.J., (2004) Nanotechnology, 15, p. 672. ,