Dynamic Analysis Of Silicon Micromachined Double-rotor Scanning Mirror

The use of MEMS-based technologies for producing scanning mirrors enables its batch production with a consequent increase in the throughput and a decrease in the manufacturing costs per device. However, the use of Silicon as a structural material could introduce non-linearities in the device behavior due to the variation of its mechanical properties according to the crystalline orientation. The orthotropic properties when taken into account in the finite element model of the device could enhance the accuracy in the design of micromachined scanning mirrors. The model used in this paper does not take into account the orthotropic behavior, however, satisfactory results were obtained. To validate the finite element model, a modal analysis of the device was performed using the Laser Doppler Vibrometry method. The normal modes of the structure were identified and the results agree well with the finite element model. This work presents the FE model and experimental modal analysis results of a Silicon micromachined double-rotor scanning mirror. Copyright © 2006 by ABCM.284443447Barbaroto, P.R., Ferreira, L.O.S., Doi, I., Micromachinedscanner actuated by electromagnetic induction (2002) Proceedings of SPIE, 4092, pp. 691-698Kovacs, G.T.A., Maluf, N.I., Petersen, K.E., Bulk micromachining of silicon (1998) Proceedings of IEEE, 86 (8), pp. 1536-1551Miyajima, H., Asaoka, N., Isokawa, T., Ogata, M., Aoki, Y., Imai, M., Fujimori, O., Matsumoto, K., A MEMS electromagnetic optical scanner for a commercial confocal laser scanning microscope (2003) Journal of Microelectromechanical Systems, 12 (3), pp. 243-251Oliveira, L.C.M., Ferreira, L.O.S., Silicon Micromachined Double-Rotor Scanner (2003) Proceedings of SPIE, 21 (3), pp. 634-642Oliveira, L. C. M., 2006, Contributions for the Improvement in the Performance and Manufacture Viability of Planar Inductive Scanners (In Portuguese), Ph.D. Thesis, State University of Campinas, Campinas, S.P., Brazil, 206 pOliveira, L.C.M., Barbaroto, P.R., Ferreira, L.P.S., Doi, I., A novel Si micromachined moving-coil induction actuated min-sized resonant scanner (2006) J. Micromech. Microeng, 16, pp. 165-172Petersen, K.E., Silicon torsional scanning mirror (1980) IBM J. Res. Develop, 24 (5), pp. 631-637Seidel, H., Csepregi, I., Heuberger, A., Baumgartel, H., Anisotropic Etching of Crystalline Silicon in Alkaline Solutions (1990) J. Eletrochem. Soc, 137 (11), pp. 3612-3626Seidel, H., Csepregi, I., Heuberger, A., Baumgartel, H., Anisotropic Etching of Crystalline Silicon in Alkaline Solutions. II Influence of Dopants (1990) J. Eletrochem. Soc, 137 (11), pp. 3626-3632Urbach, J.C., Fisli, T.S., Starkweather, G.K., Laser scanning for electronic printing (1982) Proceedings of IEEE, 70, pp. 597-618Williams, K.R., Muller, R.S., Etch Rates for Micromachining Processing (1996) Journal of Microelectromechanical Systems, 5 (4), pp. 256-269Wu, M.C., Micromachining for optical and optoelectronic systems (1997) Proceedings of IEEE, 85 (11), pp. 1833-1856Zeleny, R., Scanning the Scene (2004) SPIE's OEmagazine, pp. 30-3