Uncooled Thermal Infrared Detector For Detection Of Far-infrared Radiation

This work presents the first fabrication of surface-micromachined microbolometers made of polycrystalline silicon. The detection of radiation in the range of submillimeter and far infrared wavelengths has various applications in remote passive radiometric sensing such as imaging of field targets, power line surveys, night vision, radio meteorology, atmospheric propagation and astrophysics. Developments directed to potential interest for telecommunications in that band have been increasing in recent years. The complete process of a non-imaging bolometer detector for incoherent radiation in the submillimeter bands is presented. The first applications considered for the system are measurements of atmospheric propagation, solar imaging and tentative detection of solar transients (flares) in the selected bands.395100Parsons, A.D., Pedder, D.J., (1988) J. Vac. Sci Techn., 6, p. 3Dobrzanski, L., Nossarzewska-Orlowska, E., Nowak, Z., Piotrowski, J., (1997) Sensors and Actuators A, p. 60Sedky, S., Fiorini, P., Caymax, M., Verbit, A., Baert, C., (1997) Sensors and Actuators A, , June 16-19Zerov, V.Y., Malyarov, V.G., (2001) J. Opt. Techn., p. 68Lee, S.J., Lee, Y.H., Suh, S.H., Oh, Y.J., Kim, T.Y., Oh, M.H., Kim, C.J., Ju, B.K., (2001) Sensors and Actuators A, p. 95Sedky, S., Fiorini, P., Baert, C., Hermans, L., Mertens, R., (1999) IEEE Transactions on Electron Devices, 46, p. 4Jeon, Y.C., King, T.J., Howe, R.T., (2003) J. Electroch. Soc., 150, p. 1Zhou, H.W., Kharas, B.G., Gouma, P.I., (2003) Sensors and Actuators A, p. 104Kotb, H.M., Salaün, A.C., Brahim, T.M., Biham, F.I., El-Marssi, M., (2003) Thin Solid Film, p. 427Harris, L., Beasley, J.K., (1952) J. Opt. Soc. Am., 42, p. 2Hilsum, C., (1954) J. Opt. Soc. Am., 44, p. 3Becker, W., Fetting, R., Ruppel, W., (1999) Infrared Physics & Technology, p. 40Madou, M., (1997) Fundamentals of Microfabrication, , CRC Press, Boca RatonGriffin, M.J., (2000) Nucl. Instrum. Meth. Phys. Res. A, p. 444Zhao, Y., Mao, M., Horowitz, R., Majumdar, A., Varesi, J., Norton, P., Kitching, J., (2002) Journal of Microelectromechanical Systems, 11, p. 2Gerwen, P.V., Slater, T., Chévrier, J.B., Baert, K., Mertens, R., (1996) Sensors and Actuators A, p. 5