Performance of sheath electric field measurement by saturation spectroscopy in Balmer-α line of atomic hydrogen

We developed a diode laser-based system for measuring the sheath electric fields in low-temperature plasmas. The Stark spectrum of the Balmer-α line of atomic hydrogen was measured by saturation spectroscopy with a fine spectral resolution. The spectrum observed experimentally was consistent with the theoretical Stark spectrum, and we succeeded in evaluating the electric field strength on the basis of the experimental Stark spectrum. A sensitive detection limit of 10 V/cm was achieved by the developed system