Microfabricated gas sensor systems with sensitive nanocrystalline metal-oxide films

This article gives an overview on recent developments in metal-oxide-based gas sensor systems, in particular on nanocrystalline oxide materials deposited on modern, state-of-the-art sensor platforms fabricated in microtechnology. First, metal-oxide-based gas sensors are introduced, and the underlying principles and fundamentals of the gas sensing process are laid out. In the second part, the different deposition methods, such as evaporation, sputtering, sol–gel techniques, aerosol methods, and screen-printing, and their applicability to micro-scale substrates are discussed in terms of their deposition precision, the achievable layer thickness, as well as with regard to the possibility to use pre-processed materials. In the third part, microsensor platforms and, in particular, semiconductor- and microelectronics-based sensor platforms, which have been fabricated in, e.g., standard CMOS-technology (CMOS: complementary metal-oxide semiconductor), are briefly reviewed. The use of such microfabricated sensor platforms inevitably imposes constraints, such as temperature limits, on the applied nanomaterial processing and deposition methods. These limitations are discussed and work-arounds are described. Additionally, monolithic sensor systems are presented that combine microtransducers or microhotplates, which are coated with nanomaterials, with the necessary control and driving electronics on a single chip. The most advanced of such systems are standalone units that can be directly connected to a computer via a digital interface