Single-Crystalline CaMoO3and SrMoO3Films Grown by Pulsed Laser Deposition in a Reductive Atmosphere

Single-crystalline thin films of CaMoO3 and SrMoO3 with a Mo4+ state perovskite structure have been epitaxially grown by pulsed-laser deposition from Mo6+ state ceramic targets. Phase-pure films were obtained on nearly lattice-matched perovskite substrates using argon gas flow during the deposition. Transport properties of the films are consistent with those of paramagnetic and metallic phases, whereas the residual resistivities are far lower than those reported previously for films and bulk polycrystals. These results indicate that this growth method can be useful for exploring the interfaces and junction properties of 4d and 5d transition metal oxides that are unstable in a conventional oxidative atmosphere