Plasma-based ion implantation (PBII) allows the formation of diamond-like carbon (DLC) films with excellent tribological properties. A large number of examples from the literature are discussed in detail, and the process parameters of PBII, such as plasma-forming gas, bias voltage, pulse length, pulse repetition rate and experimental setup, are correlated with the DLC film properties, such as bonding characteristics, stress, hardmess, friction and wear behavior and corrosion protection ability. Trends in the variation of film features with the process parameters are shown, and the underlying physical processes are discussed
Diamond-like carbon (DLC) films were successfully deposited on Ti-50.8at%Ni using plasma based ion i...
Silicon containing diamondlike carbon (Si-DLC) films were prepared on silicon wafer substrates by a ...
The addition of halogens to diamond-like carbon (DLC) films provides attractive film properties, e.g...
Plasma-based ion implantation (PBII) allows the formation of diamond-like carbon (DLC) films with ex...
Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation...
Plasma source ion implantation (PSII) is a technique that is suitable for implantation as well as fi...
Diamond-like carbon (DLC) films were prepared by a plasma source ion implantation method with superp...
Diamond-like carbon (DLC) films were prepared from a hydrocarbon precursor gas by plasma source ion ...
Hard diamond-like carbon (DLC) films have been prepared on PMMA (Polymethyl methacrylate), glass, an...
There currently exists a broad range of applications for which the ability to produce an adherent, h...
Diamond-like carbon (DLC) films have been deposited on dissimilar substrates using three different d...
Various techniques are currently used to produce diamond-like carbon (DLC) coatings on various mater...
In Chapter 5 the attention turns to the PIII&D and Prof. Ensinger reviews the history of the PIII&D ...
The doping effect of silver on the structure and properties of diamond-like carbon (DLC) films was i...
The addition of nitrogen to diamond-like carbon films affects properties such as the inner stress of...
Diamond-like carbon (DLC) films were successfully deposited on Ti-50.8at%Ni using plasma based ion i...
Silicon containing diamondlike carbon (Si-DLC) films were prepared on silicon wafer substrates by a ...
The addition of halogens to diamond-like carbon (DLC) films provides attractive film properties, e.g...
Plasma-based ion implantation (PBII) allows the formation of diamond-like carbon (DLC) films with ex...
Plasma immersion ion implantation with hydrocarbon gases (HC-PIII) leads to both carbon implantation...
Plasma source ion implantation (PSII) is a technique that is suitable for implantation as well as fi...
Diamond-like carbon (DLC) films were prepared by a plasma source ion implantation method with superp...
Diamond-like carbon (DLC) films were prepared from a hydrocarbon precursor gas by plasma source ion ...
Hard diamond-like carbon (DLC) films have been prepared on PMMA (Polymethyl methacrylate), glass, an...
There currently exists a broad range of applications for which the ability to produce an adherent, h...
Diamond-like carbon (DLC) films have been deposited on dissimilar substrates using three different d...
Various techniques are currently used to produce diamond-like carbon (DLC) coatings on various mater...
In Chapter 5 the attention turns to the PIII&D and Prof. Ensinger reviews the history of the PIII&D ...
The doping effect of silver on the structure and properties of diamond-like carbon (DLC) films was i...
The addition of nitrogen to diamond-like carbon films affects properties such as the inner stress of...
Diamond-like carbon (DLC) films were successfully deposited on Ti-50.8at%Ni using plasma based ion i...
Silicon containing diamondlike carbon (Si-DLC) films were prepared on silicon wafer substrates by a ...
The addition of halogens to diamond-like carbon (DLC) films provides attractive film properties, e.g...
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