Absolute sputtering yields from solid Ne by low energy He+ and Arq+ (1 ≤ q ≤ 6) impact

Absolute sputtering yields from the surface of solid Ne by low energy He+ and Arq+ (1 ≥ q ≥ 6) impact are measured. Very large sputtering yields (300 atoms/ion for 1 keV He+ impact, and 3000 atoms/ion for 1keV Ar+ impact) have been observed. A significant dependence of the sputtering yields on the chage state, i.e. the potential energy, of the incident ion for Arq+ has not been observed because it is estimated to be much smaller than that of the kinetic sputtering, which suggests that the mechanism of potential sputtering is similar to those known for the electron- and photon-stimulated desorption processes