Development of a Linear Ultrasonic Motor with Segmented Electrodes

A novel segmented electrodes linear ultrasonic motor (USM) was developed. Using a planar vibration mode concept to achieve elliptical motion at the USM drive-tip, an attempt to decouple the components of the drive-tip trajectory was made. The proposed design allows greater control of the drive-tip trajectory without altering the excitation voltage. Finite element analyses were conducted on the proposed design to estimate the performance of the USM. The maximum thrust force and speed are estimated to be 46N and 0.5370m/s, respectively. During experimental investigation, the maximum thrust force and speed observed were 36N and 0.223m/s, respectively, at a preload of 70N. Furthermore, the smallest step achievable was 9nm with an 18μs impulse. Nevertheless, the proposed design allowed the speed of the USM to vary while keeping the thrust force relatively constant and allowed the USM to achieve high resolution without a major sacrifice of thrust force.MAS