Fabrication of optical devices by rotation controlled nanoimprinting

In this work, the angular positioning accuracy was evaluated by imprinting gratings with 250 nm features into thermoplastic polymer by varying the angle by 15° steps. The quality of the imprints was evaluated by optical and AFM microscopy. The theta angle of the gratings was measured by SEM. In figure fourteen imprints with theta angles between -90° and +90° are shown