Silicon Membranes for Nanophononics
- Varpula, A.
- Shchepetov, A.
- Grigoras, K.
- Hassel, J.
- Prunnila, Mika
- Ahopelto, J.
Publication date
July 2018
DOI Publisher
IEEE Institute of Electrical and Electronic EngineersAbstract
The highly reduced thermal conductivity arising from confinement of acoustic phonons and enhanced phonon scattering in ultra-thin freestanding silicon membranes enables fabrication of sensitive thermal thermoelectric detectors. The devices show very low noise equivalent power of 13 pW/ Hz 1/2 and relatively fast operation. By optimizing the structure and electrical properties of the detector, the operation can approach the temperature fluctuation limit. </p
Add to ORKG