The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for the operation of thin-film bulk acoustic wave (BAW) devices. For instance, the behavior of the side resonances that may contaminate the electrical response of a thin-film BAW resonator depends on the dispersion relation of the layer stack. Because the dispersion behavior depends on the materials parameters (and thicknesses) of the layers in the structure, measurement of the dispersion curves provides a tool for determining the materials parameters of thin films. We have determined the dispersion curves for a multilayer structure through measuring the mechanical displacement profiles over the top electrode of a thin-film BAW resonator at sever...
We used the Continuous Wave Scanning Acoustic Microscope to characterize thin film materials. The me...
We used the Continuous Wave Scanning Acoustic Microscope to characterize thin film materials. The me...
A heterodyne laser interferometer is used to study acoustic wave fields excited in a 1.8 GHz AlN thi...
The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for ...
The acoustic wave fields excited in a 1.8 GHz AlN thin film bulk acoustic wave resonator are measure...
The acoustic wave fields excited in a 1.8 GHz AlN thin film bulk acoustic wave resonator are measure...
A heterodyne laser interferometer is used for a detailed study of acoustic wave fields excited in a ...
A heterodyne laser interferometer is used for a detailed study of acoustic wave fields excited in a ...
Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acousti...
Laser interferometric measurement and Fourier transformation techniques have been used to extract th...
The determination of piezoelectric properties of an aluminium nitride thin film sandwiched between t...
A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited i...
A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited i...
Thin film bulk acoustic wave (BAW) resonators and filters operating in the GHz range are used in mob...
We used the Continuous Wave Scanning Acoustic Microscope to characterize thin film materials. The me...
We used the Continuous Wave Scanning Acoustic Microscope to characterize thin film materials. The me...
We used the Continuous Wave Scanning Acoustic Microscope to characterize thin film materials. The me...
A heterodyne laser interferometer is used to study acoustic wave fields excited in a 1.8 GHz AlN thi...
The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for ...
The acoustic wave fields excited in a 1.8 GHz AlN thin film bulk acoustic wave resonator are measure...
The acoustic wave fields excited in a 1.8 GHz AlN thin film bulk acoustic wave resonator are measure...
A heterodyne laser interferometer is used for a detailed study of acoustic wave fields excited in a ...
A heterodyne laser interferometer is used for a detailed study of acoustic wave fields excited in a ...
Acoustic wave fields both within the active electrode area of a solidly mounted 1.8 GHz bulk acousti...
Laser interferometric measurement and Fourier transformation techniques have been used to extract th...
The determination of piezoelectric properties of an aluminium nitride thin film sandwiched between t...
A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited i...
A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited i...
Thin film bulk acoustic wave (BAW) resonators and filters operating in the GHz range are used in mob...
We used the Continuous Wave Scanning Acoustic Microscope to characterize thin film materials. The me...
We used the Continuous Wave Scanning Acoustic Microscope to characterize thin film materials. The me...
We used the Continuous Wave Scanning Acoustic Microscope to characterize thin film materials. The me...
A heterodyne laser interferometer is used to study acoustic wave fields excited in a 1.8 GHz AlN thi...