The effect of near-surface structure on sputtering of Cu atoms by Ar ions

Sputtering of Cu targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code COSIPO. The sensitivity of the angular distributions of sputtered atoms on the near-surface structure is demonstrated by having a thin monorandom layer on a random/monocrystalline Cu target. Just two monolayers nearly destroy the angular distributions due to the underlying structure