Miniaturized MOEMS spectrometer technology for gas sensing

Antila, Jarkko
Rissanen, Anna
Mannila, Rami
Mäkynen, Jussi
Näkki, Ismo
Tuohiniemi, Mikko

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Publication date

January 2013

DOI

10.1109/OMN.2013.6659058

Publisher

IEEE Institute of Electrical and Electronic Engineers

Abstract

VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors

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Miniaturized MOEMS spectrometer technology for gas sensing

Abstract

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Miniaturized MOEMS spectrometer technology for gas sensing

Abstract

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