Scaling up MnCo2O4 ALD Process for Coating SOFC Interconnect Plates

Solid oxide fuel cells (SOFCs) are an interesting choice for an energy production because of their high effi-ciency, low emission rate and fuel flexibility. Metallic interconnect (IC) plates, which separate fuel and oxidant from each other, act as electrical and thermal conductors between adjacent cells and give mechanical support to stack structure. Nevertheless, metallic IC plates suffer from oxidation and degradation at SOFC operating temperatures of 600 - 800 °C. Thus, they need protective coatings, of which the spinel structured MnCo2O4 has drawn attention recently. It has been previously deposited by ALD onto small sized R&D (e.g. 2.5 x 2.5 cm2) substrates. Here we report scaling up the MnCo2O4 ALD process onto 9 x 9 cm2 ferritic stainless steel interconnect plates for solid oxide fuel cells applications. Also the deposition efficiency and cost estimation for the further scaling up is dis-cussed in detai