An interferometrically traceable metrology atomic force microscope (IT-MAFM) was designed and constructed at MIKES. Known error sources were minimized in the design (Abbe error, thermal drift, vibrations) or corrected (laser interferometer nonlinearity, vibrations). Drifts mainly caused by temperature changes were characterized and the results will be used to optimize the measurement procedure.</p
In order to obtain the high accuracy required for a metrological atomic force microscope, the sample...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002.Includes...
This Ph.D. project is aimed at developing and validating techniques for successful use of Atomic For...
An interferometrically traceable metrology atomic force microscope (IT-MAFM) was designed and constr...
An interferometrically traceable metrological atomic force microscope (IT-MAFM) has been developed a...
KULeuven is currently developing a metrological atomic force microscope (metrological AFM), with an ...
Advances in the electronics sector, medicine and material sciences have increased the need for inspe...
A metrological Atomic Force Microscope (mAFM) has been developed at LNE [1, 2]. It is mainly used fo...
In order to obtain the high accuracy required for a metrological atomic force microscope, the sample...
KULeuven is currently developing on demand of and for the national Belgian Metrology Laboratory (SMD...
Traceability of measurements and calibration of devices are needed also at the nanometre scale. Cali...
Reliability of measurement is a crucial element of both research and industry. Metrological traceabi...
The design of a large measurement-volume metrological atomic force microscope (AFM) is presented. Th...
In the design of the metrological atomic force microscope (mAFM), the commercial scanhead is adapted...
This thesis describes the design, fabrication, and testing of a metrological atomic force microscope...
In order to obtain the high accuracy required for a metrological atomic force microscope, the sample...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002.Includes...
This Ph.D. project is aimed at developing and validating techniques for successful use of Atomic For...
An interferometrically traceable metrology atomic force microscope (IT-MAFM) was designed and constr...
An interferometrically traceable metrological atomic force microscope (IT-MAFM) has been developed a...
KULeuven is currently developing a metrological atomic force microscope (metrological AFM), with an ...
Advances in the electronics sector, medicine and material sciences have increased the need for inspe...
A metrological Atomic Force Microscope (mAFM) has been developed at LNE [1, 2]. It is mainly used fo...
In order to obtain the high accuracy required for a metrological atomic force microscope, the sample...
KULeuven is currently developing on demand of and for the national Belgian Metrology Laboratory (SMD...
Traceability of measurements and calibration of devices are needed also at the nanometre scale. Cali...
Reliability of measurement is a crucial element of both research and industry. Metrological traceabi...
The design of a large measurement-volume metrological atomic force microscope (AFM) is presented. Th...
In the design of the metrological atomic force microscope (mAFM), the commercial scanhead is adapted...
This thesis describes the design, fabrication, and testing of a metrological atomic force microscope...
In order to obtain the high accuracy required for a metrological atomic force microscope, the sample...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002.Includes...
This Ph.D. project is aimed at developing and validating techniques for successful use of Atomic For...