A metal-to-metal contact RF MEMS switch towards handsets applications

A MEMS switch for radio frequency applications has been designed, fabricated, and characterized. The focus has been in the optimization of switch performance towards handset applications. The realized switch has actuation voltage less than 15 V for realizing a good metal-to-metal contact. Measured results show loss less than 0.25 dB up to 10 GHz with matching better than -30 dB in the down-state, and isolation better than -20 dB up to 6 GHz in the up-state. (3 refs.