An ac root-mean-square (RMS) voltage reference based on a microelectromechanical system (MEMS) component is presented. The device stability is investigated in various experiments. A time stability at a level of a few μV/V in 24 h was measured using an accelerometer MEMS component at an operating frequency of 100 kHz
Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric i...
This paper describes our work with two applications of microelectromechanical systems (MEMS): a sens...
Microelectromechanical systems (MEMS) are excellent candidates for electrical metrology. Thanks to t...
The design and characterization of a high stability capacitive MEMS device intended for an AC voltag...
Voltage references are fundamental building blocks in many instruments like data logging systems, di...
Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (ME...
Microelectromechanical systems (MEMS) have been recently proposed for realizing several references i...
Voltage references are fundamental building blocks in many instruments like data logging systems, di...
In this thesis, the focus is on a microelectromechanical system (MEMS) based AC voltage reference im...
Microelectromechanical systems (MEMS) will have an important role in metrology. The essential featur...
We have designed and manufactured a micromachined moving plate capacitor to be used as an AC voltage...
Abstrac t – This work explores the MEMS potentialities to fabricate flexible AC voltage references ...
Microelectromechanical systems (MEMS) have been proposed as DC electrical metrology references. The ...
Prototype of a novel DC voltage reference has been constructed. A characteristic voltage of an elect...
Micromechanical AC and DC standards, suitable for compact, low-cost precision electronics applicatio...
Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric i...
This paper describes our work with two applications of microelectromechanical systems (MEMS): a sens...
Microelectromechanical systems (MEMS) are excellent candidates for electrical metrology. Thanks to t...
The design and characterization of a high stability capacitive MEMS device intended for an AC voltag...
Voltage references are fundamental building blocks in many instruments like data logging systems, di...
Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (ME...
Microelectromechanical systems (MEMS) have been recently proposed for realizing several references i...
Voltage references are fundamental building blocks in many instruments like data logging systems, di...
In this thesis, the focus is on a microelectromechanical system (MEMS) based AC voltage reference im...
Microelectromechanical systems (MEMS) will have an important role in metrology. The essential featur...
We have designed and manufactured a micromachined moving plate capacitor to be used as an AC voltage...
Abstrac t – This work explores the MEMS potentialities to fabricate flexible AC voltage references ...
Microelectromechanical systems (MEMS) have been proposed as DC electrical metrology references. The ...
Prototype of a novel DC voltage reference has been constructed. A characteristic voltage of an elect...
Micromechanical AC and DC standards, suitable for compact, low-cost precision electronics applicatio...
Microelectromechanical systems (MEMS) provide great potential for metrology and precision electric i...
This paper describes our work with two applications of microelectromechanical systems (MEMS): a sens...
Microelectromechanical systems (MEMS) are excellent candidates for electrical metrology. Thanks to t...
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