Analysis of co-sputtered in situ annealed superconducting Y₁Ba₂Cu₃O_7-x thin films

Ion beam analyses have been used for characterization of superconducting Y1Ba2Cu3O7 - x thin films deposited by reactive co-sputtering from Y, BaCu and Cu targets combined with in situ postannealing. Ion backscattering spectra for4He and 12C ions have been obtained in the energy range 2-20 MeV. Resonant scattering of 4He ions from 16O at 3.045 MeV has been used to determine the oxygen contents of the films. The data from these measurements have been compared to results obtained with other characterization methods. The film morphology and lateral homogeneity have been examined using SEM and SIMS element mapping. X-ray diffraction have been used for crystalline phase identification. The film resistivity as a function of temperature has been measured in a cryocooler using the Van der Pauw method.