Atomic and molecular layer deposition (ALD and MLD, respectively) techniques are examples of self-assembly based on repeated cycles of self-limiting gas-solid reactions. The precursors are pulsed into a reactor alternately, separated by inert gas pulses. During a single cycle, only one molecular layer is deposited on the surface, enabling tailored film composition in principle down to molecular resolution on ideal surfaces. These cycles are repeated until a layer with a specific thickness is achieved. Few materials are, however, ideal. During the early film growth precursors adsorb onto the surface and absorb into the near-surface regions depending both on the substrate and the deposition parameters. These precursors can react with the subs...
Atomic layer deposition (ALD) is a surface controlled layer-by-layer process based on self-limiting ...
Atomic layer deposition (ALD) is a layer-by-layer deposition process based on repeated self-limiting...
We present a procedure for growing thin films of an organic polyamid material based on a cyclic repe...
Atomic and molecular layer deposition (ALD and MLD, respectively) techniques are examples of self-as...
Atomic and molecular layer deposition (ALD and MLD, respectively) are based on repeated cycles of ga...
The need for tighter control over film uniformity, conformality, and properties at decreasing thickn...
Atomic layer deposition (ALD) is a form of chemical vapor deposition that uses cyclic, sequential ga...
Possibility to control the adhesion properties is important in various industrial applications. Sinc...
Possibility to control the adhesion properties is important in various industrial applications. Sinc...
The fabrication of many devices in modern technol-ogy requires techniques for growing thin films. As...
The public defense will be organized via remote technology. Follow defence on 4.12.2020 12:00 – 15:0...
Atomic layer deposition (ALD), also referred to historically as atomic layer epitaxy, is a vapor-pha...
Atomic layer deposition (ALD) is an ultra-thin film deposition technique that has found many applica...
Biopolymers play still a relatively minor role in the packaging material markets. For this to grow f...
Atomic layer deposition can be defined as a film deposition technique that is based on the sequentia...
Atomic layer deposition (ALD) is a surface controlled layer-by-layer process based on self-limiting ...
Atomic layer deposition (ALD) is a layer-by-layer deposition process based on repeated self-limiting...
We present a procedure for growing thin films of an organic polyamid material based on a cyclic repe...
Atomic and molecular layer deposition (ALD and MLD, respectively) techniques are examples of self-as...
Atomic and molecular layer deposition (ALD and MLD, respectively) are based on repeated cycles of ga...
The need for tighter control over film uniformity, conformality, and properties at decreasing thickn...
Atomic layer deposition (ALD) is a form of chemical vapor deposition that uses cyclic, sequential ga...
Possibility to control the adhesion properties is important in various industrial applications. Sinc...
Possibility to control the adhesion properties is important in various industrial applications. Sinc...
The fabrication of many devices in modern technol-ogy requires techniques for growing thin films. As...
The public defense will be organized via remote technology. Follow defence on 4.12.2020 12:00 – 15:0...
Atomic layer deposition (ALD), also referred to historically as atomic layer epitaxy, is a vapor-pha...
Atomic layer deposition (ALD) is an ultra-thin film deposition technique that has found many applica...
Biopolymers play still a relatively minor role in the packaging material markets. For this to grow f...
Atomic layer deposition can be defined as a film deposition technique that is based on the sequentia...
Atomic layer deposition (ALD) is a surface controlled layer-by-layer process based on self-limiting ...
Atomic layer deposition (ALD) is a layer-by-layer deposition process based on repeated self-limiting...
We present a procedure for growing thin films of an organic polyamid material based on a cyclic repe...