Iterative Learning Control for Precision Motion Control of Microscale and Nanoscale Tracking Systems

154 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2007.Second, we develop a set of time-frequency ILC design and analysis techniques. These techniques are used to custom-design the ILC for precision tracking of aggressive trajectories suitable for rapid microscale and nanoscale manufacturing, assembly, or scanning. They are also useful for applications where disturbance signals may change rapidly such as in micro- and nano-materials testing. The time-frequency ILC is applied to a 3-DOF piezo driven flexure stage yielding 4x higher bandwidth over the original feedback controller and achieving 1500 Hz tracking bandwidth during critical partitions of a given trajectory.U of I OnlyRestricted to the U of I community idenfinitely during batch ingest of legacy ETD