Modeling and Simulation of Integrated Microstructures and Systems

147 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 2001.To overcome the shortcomings of the above mentioned approaches, the goal of our research is to develop accurate computer-aided design tools and integrated design flow methodologies that provide orders-of-magnitude reduction in design and simulation cycle time; thus the cost of integrated microsystems. We have developed (i) automatic nonlinear model-order reduction methods to develop accurate behavioral models for MEMS devices; (ii) electrical modeling of MEMS devices; and (iii) an event-driven multilevel simulation environment to enable complete simulation of mixed-signal and mixed-technology integrated microsystems. These developments will allow microsystem simulation to be both fast and accurate. Design time will be decreased with quality improvement. System functionality and performance can be verified before committing to fabrication, thereby minimizing design iterations.U of I OnlyRestricted to the U of I community idenfinitely during batch ingest of legacy ETD